Semiconductor Manufacturing, Spring 2003
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| Type: | Course Related Materials |
| Grade Level: | Post-secondary |
Author: Boning, Duane
Subject: Science and Technology
Institution Name:
M.I.T.
Collection Name: MIT OpenCourseWare
Abstract: 6.780 covers statistical modeling and the control of semiconductor fabrication processes and plants. Topics include design of experiments, response surface modeling, and process optimization; defect and parametric yield modeling; process/device/circuit yield optimization; monitoring, diagnosis, and feedback control of equipment and processes; analysis and scheduling of semiconductor manufacturing operations.
Details
Course Type: Full Course
Material Types: Activities and Labs, Assessments, Homework and Assignments, Lecture Notes, Syllabi
Media Formats: Text/HTML, Downloadable docs
Language: English
Additional Information
Geographic
Regional Relevance: All
Reviews
By: lewlee
- How did you use this material?
My own personal knowledge
- In which courses or programs did you use the material?
I used this to try and better understand semiconductors.
- What knowledge and skills do you need?
Yes.
- Is the material appropriate?
Yes.
